Process for hydrogenating silicon tetrachloride
AssigneeWacker Chemie AG
InventorsMartin Zettl, Andreas Hirschmann, Uwe Pätzold, Robert Ring
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Abstract
The invention relates to a process for hydrogenating silicon tetrachloride in a reactor, wherein a reactant gas containing hydrogen and silicon tetrachloride is heated to a temperature between 850° C. and 1600° C. by means of at least one heating element, which comprises a graphite surface, wherein the temperature of the heating element is between 850° C. and 1600° C. The process is characterized in that a nitrogen compound is added to the reactant gas in a substance amount fraction of 0.1 to 10% based on hydrogen.
Claims18
A method for hydrogenating silicon tetrachloride in a reactor, comprising:
- supplying a feed gas comprising hydrogen and silicon tetrachloride to a reactor and heating the feed gas to a temperature in the range from 850° C. to 1600° C. by employing at least one heating element comprising a graphite surface, the at least one heating element located within the reactor and in direct contact with the feed gas, the temperature of the heating element being in the range 850° C. to 1600° C., wherein nitrogen is added to the reactor in a molar proportion of from 0.1 to 10% based on hydrogen in the feed gas.
Dependencies are inferred from the claim text.