Deformable membrane and a compensating structure thereof

A sensor comprising:

• a substrate comprising a cavity therein;
• an electrode positioned at a bottom of the cavity of the substrate;
• a deformable membrane positioned on the substrate, wherein the deformable membrane encloses the cavity, wherein the deformable membrane deforms responsive to external stimuli;
• and
• a compensation structure coupled to the deformable membrane, wherein the compensation structure and the deformable membrane are on different planes, and wherein the compensation structure creates a compensation force that is opposite to a bending force of the deformable membrane responsive to temperature changes and thermal coefficient mismatch.

A method comprising:

• forming an electrode on a substrate;
• selectively forming an oxide layer on a portion of the substrate;
• forming a deformable membrane on the formed oxide layer, wherein the deformable membrane and the formed oxide layer forms a sealed cavity therein, wherein the deformable membrane deforms responsive to external stimuli;
• and
• forming a compensation structure on the deformable membrane, wherein the compensation structure creates a compensation force that is opposite to a bending force of the deformable membrane responsive to temperature changes and thermal coefficient mismatch.