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US 10,948,835 B2Granted
Method of leveling wafer in exposure process and exposure system thereof
AssigneeXia Tai Xin Semiconductor (Qing Dao) Ltd.
InventorBum-Hwan Jeon
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a method of leveling a wafer in an exposure process. The wafer includes a plurality of regions. The wafer is loaded to an exposure system. The exposure system includes a control unit and a leveling module. The control unit of the exposure system obtains layout information of the reticle. The control unit of the exposure system assigns critical regions and non-critical regions to the regions on the wafer according to the layout information of the reticle.
Claims8
A method of leveling a wafer in an exposure process, the method comprising:
- loading the wafer to an exposure system, wherein the exposure system comprises a control unit and a leveling module;
- obtaining layout information of a reticle by the control unit, wherein the reticle comprises at least one scribe line and at least one die region, the layout information of the reticle comprises a coordinate and a size of each of the scribe line and the die region;
- assigning critical regions and non-critical regions to a plurality of regions on the wafer according to the layout information of the reticle by the control unit, wherein the non-critical regions on the wafer are assigned according to the coordinate and the size of each of the scribe line and a portion the die region, and the critical regions on the wafer are assigned according to the coordinate and the size of another portion of the die region;
- positioning one region of the plurality of regions on the wafer by the leveling module;
- determining whether the region is one of the non-critical regions by the control unit;
- and
- pre-scanning the region by the leveling module of the exposure system according to a determining result.
4 more elements
A method of leveling a wafer in an exposure process, the method comprising:
- loading the wafer to an exposure system, wherein the exposure system comprises a leveling module and a control unit;
- pre-scanning the wafer by the leveling module to obtain topography data of the wafer;
- obtaining layout information of a reticle by the control unit, wherein the reticle comprises at least one scribe line and at least one die region, the layout information of the reticle comprises a coordinate and a size of each of the scribe line and the die region;
- assigning critical regions and non-critical regions to a plurality of regions on the wafer according to the layout information of the reticle by the control unit, wherein the non-critical regions on the wafer are assigned according to the coordinate and the size of each of the scribe line and a portion the die region, and the critical regions on the wafer are assigned according to the coordinate and the size of another portion of the die region;
- and
- modifying the topography data of the wafer according to the critical regions and the non-critical regions on the wafer by the control unit.
3 more elements
A method of pattern transferring in an exposure process, the method comprising:
- loading a wafer to an exposure system, wherein the exposure system comprises a control unit, a leveling module, and a projection module;
- obtaining layout information of a reticle by the control unit of the exposure system, wherein the reticle comprises at least one scribe line and at least one die region, the layout information of the reticle comprises a coordinate and a size of each of the scribe line and the die region;
- assigning critical regions and non-critical regions to a plurality of regions on the wafer according to the layout information of the reticle by the control unit, wherein the non-critical regions on the wafer are assigned according to the coordinate and the size of each of the scribe line and a portion the die region, and the critical regions on the wafer are assigned according to the coordinate and the size of another portion of the die region;
- positioning one region of the plurality of regions on the wafer by the leveling module;
- determining whether the region is one of the non-critical regions by the control unit;
- pre-scanning the region by the leveling module of the exposure system without recording topography data of the region if the region is determined to be one of the non-critical regions, or pre-scanning the region and recording the topography data of the region by the leveling module if the region is not determined to be one of the critical regions;
- and
- exposing the reticle to the wafer by the projection module according to the recorded topography data of the wafer.
5 more elements
Dependencies are inferred from the claim text.