Mask plate and manufacture method thereof

Abstract

The present disclosure provides a mask plate and a manufacture method thereof, the mask plate including: a mask body, which is provided with an opening penetrating through a thickness of the mask body; a special-shaped portion configured to be disposed at an edge of the opening and protrudes toward a center of the opening, and configured to be formed by the mask body; and at least one deformation adjustment layer disposed on the mask body or in the mask body, an orthographic projection of the at least one deformation adjustment layer on a plane in which a first surface of the mask body is located at least partially overlaps with an orthographic projection of the special-shaped portion on the plane in which the first surface of the mask body is located, wherein a thermal expansion coefficient of the deformation adjustment layer is different from that of the special-shaped portion.

Dependencies are inferred from the claim text.