Tune able masks for PVD deposit thickness uniformity management
OwnerShiping Chenginventor
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Abstract
The tunable mask in the current invention comprises three parts: a mask body, an upper piece, and a lower piece. When these parts are assembled together, either or both of the upper and lower pieces' positions on the mask body can be adjusted to form various shapes of the tunable mask. Different shapes of upper and lower pieces are also available for use. During the coating process in a physical vapor deposition (PVD) system, a single or multiple tunable masks are positioned between the substrate and the evaporation source. Uniformity of the coating thickness on the substrate is improved when the tunable mask provides an optimal shielding effect with a selective shape.
Claims9
A tunable mask for attachment to a physical vapor deposition system to manage uniformity of the coating thickness on substrate consisting essentially of a mask body with two kidney shaped holes and an asymmetrical shape along its longitudinal axis, flat and semicircular upper piece with an arcuate ridge and two threaded holes, a flat lower piece with an arcuate rail where the arcuate ridge matches exactly to the hollow space of the arcuate rail when both upper and lower pieces are put together, and two fixing screws for affixing the upper piece to the mask body through the kidney shaped holes when the fixing screws are tightened and allowing the arcuate ridge of the upper piece to move along the arcuate rail horizontally and rotate with respect to the mask body when the fixing screws releases.
Dependencies are inferred from the claim text.