Spectroscope, optical inspection device and OCT device
AssigneeHoriba, Ltd.
InventorSeichi Sato
Life of this patent
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AssigneeHoriba, Ltd.
InventorSeichi Sato
Estimating the term…
This invention is to provide a spectroscope that can improve resolution and reduce loss of light intensity and/or distortion of a wave front while enabling detection of the optical spectrum for each of a plurality of polarization components in incident light. The spectroscope is a spectroscope that comprises a first diffraction grating 51 to which at least a transmitted light or a reflected light from an object to be measured enters, which diffracts a first polarization component of the incident light and which transmits a second polarization component that is different from the first polarization component of the incident light without diffraction, and a first light-receiving element 55 that receives a spectrum of the light diffracted by the first diffraction grating 51.
A spectroscope comprising
Dependencies are inferred from the claim text.