US 10,900,905 B2 · Probe manufacturing method and probe

Abstract

A needle-shaped body protrudes from a cantilever made of Si. Furthermore, the rear face of the cantilever is coated with aluminum (first metal) having a Fermi level higher than that of Si. The cantilever is dipped into an aqueous silver nitride solution containing the ions of Ag serving as a second metal. The electrons of Si flow out to the aqueous silver nitride solution due to the existence of the aluminum, and Ag nanostructures are precipitated at the tip end of the needle-shaped body. A probe for tip-enhanced Raman scattering in which the Ag nanostructures are fixed to the tip end of the needle-shaped body is manufactured. The sizes and shapes of the Ag nanostructures can be controlled properly by adjusting the concentration of the aqueous silver nitride solution and the time during which the cantilever is dipped into the aqueous silver nitride solution.

Claims15

Dependent claims

A method for manufacturing a probe protruding from a cantilever, comprising the step of:

dipping the cantilever made of a semiconductor, the cantilever being a coated cantilever having a part coated with a first metal and having another part from which a needle-shaped body protrudes, into a solution containing ions of a second metal, to manufacture the probe in which structures of the second metal are precipitated at a tip end of the needle-shaped body, wherein
a Fermi level of the first metal is higher than a Fermi level of the semiconductor.

Dependencies are inferred from the claim text.

Probe manufacturing method and probe

Life of this patent

Probe manufacturing method and probe

Life of this patent

Abstract

Claims15