Evaporation apparatus and calibration method thereof
AssigneeIndustrial Technology Research Institute
InventorsYu-Lin Hsu, Chien-Hung Lin, Kuo-Hsin Huang, Chao-Feng Sung, Chih-Ming Lai, Hung-Yi Chang
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Abstract
An evaporation apparatus including a material source, a chamber, a passageway, and a heating component is provided. The material source is configured to provide a deposition material. The chamber includes a manifold. The passageway is configured to be connected to the material source and the manifold. The heating component is disposed in at least a portion of the passageway and configured to heat the deposition material. A calibration method of the evaporation apparatus is also provided.
Claims18
An evaporation apparatus, comprising:
- a material source configured to provide a deposition material;
- a chamber comprising a manifold;
- a passageway configured to be connected to the material source and the manifold;
- a heating component disposed in at least a portion of the passageway and configured to heat the deposition material;
- a valve, coupled between the material source and the chamber, controlling a flow of the deposition material into the chamber;
- a quartz crystal microbalance, disposed in the chamber, measuring a deposition rate of the deposition material and an opening and closing rate of the valve;
- a pressure sensor, measuring a pressure in the manifold to detect a deposition rate of the deposition material passing through the manifold,
- wherein the evaporation apparatus respectively limits a rate of change of the deposition rate of the deposition material and a rate of change of the opening and closing rate of the valve detected by the quartz crystal microbalance within a selected range;
- and
- the evaporation apparatus heats the passageway via the heating component to control a rate of change of a deposition rate of the deposition material detected by the pressure sensor within an expected range.
A calibration method of an evaporation apparatus, wherein the evaporation apparatus includes a material source, a chamber with a manifold, a passageway coupled between the material source and the manifold, a heating component disposed within at least a portion of the passageway, a valve coupled between the material source and the chamber, a quartz crystal microbalance disposed in the chamber and a pressure sensor disposed in the manifold, wherein the calibration method comprising:
- providing a deposition material to the manifold from the material source through the passageway;
- heating the deposition material;
- respectively limiting a rate of change of a deposition rate of the deposition material and a rate of change of an opening and closing rate of the valve detected by the quartz crystal microbalance within a selected range;
- and
- heating the passageway via the heating component such that a rate of change of a deposition rate of the deposition material detected by the pressure sensor is within an expected range.
Dependencies are inferred from the claim text.