Scanner and scanning probe microscope

A scanner comprising:

• an outer frame;
• a first inner frame disposed inside the outer frame;
• a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction;
• a second inner frame disposed inside the first inner frame;
• a wide range X actuator for moving the second inner frame relative to the first inner frame in an X direction orthogonal to the Y direction;
• a third inner frame disposed inside the second inner frame;
• a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction;
• a movable base disposed inside the third inner frame;
• and
• a narrow range X actuator for moving the movable base relatively to the third inner frame in the X direction,
• wherein:
• the wide range Y actuator is a piezoelectric element expandable and contractible in the Y direction in response to a control signal, and is disposed between an inner side surface of the outer frame and an outer side surface of the first inner frame;
• the wide range X actuator is a piezoelectric element expandable and contractible in the X direction in response to a control signal, and is disposed so that one end of the wide range X actuator abuts on the approximate center in the Y direction on the inner side surface of the outer frame or on the approximate center in the Y direction on an inner side surface of the first inner frame, and the other end abuts the approximate center in the Y direction on an outer side surface of the second inner frame;
• and
• the narrow range Y actuator is a piezoelectric element expandable and contractible in the Y direction in response to a control signal, and is disposed so that one end of the narrow range Y actuator abuts on the approximate center in X direction on an inner side surface of the second inner frame, and the other end abuts the approximate center in the X direction on an outer side surface of the third inner frame.