Light-emitting element and method of manufacturing the same

A method of manufacturing a light-emitting element, comprising the successive steps of:

• forming a laminated structure body which is formed from a GaN-based compound semiconductor and in which a first compound semiconductor layer including a first surface and a second surface that is opposed to the first surface, an active layer that faces the second surface of the first compound semiconductor layer, and a second compound semiconductor layer including a first surface that faces the active layer and a second surface that is opposed to the first surface are laminated on a compound semiconductor substrate;
• forming a second electrode and a second light reflection layer on the second compound semiconductor layer;
• fixing the second light reflection layer to a support substrate;
• thinning the compound semiconductor substrate;
• forming a base portion that is a protruding portion in an exposed surface of the compound semiconductor substrate, or forming the base portion that is the protruding portion on the exposed surface of the compound semiconductor substrate;
• and
• forming a first light reflection layer on at least a part of the base portion, and forming a first electrode that is electrically connected to the first compound semiconductor layer, wherein
• the base portion constitutes a concave mirror portion, and
• the second light reflection layer has a flat shape,
• wherein a current injection region and a current non-injection region that surrounds the current injection region are provided in the second compound semiconductor layer, and
• a shortest distance DCI from an area central point of the current injection region to a boundary between the current injection region and the current non-injection region satisfies the following Expression,
• DCI≥ω0/2
• provided that,
• ω02≡(λ0/π){LOR(RDBR−LOR)}1/2
• where λ0 represents a wavelength of light that is mainly emitted from the light-emitting element, LOR represents a resonator length, and RDBR represents a radius of curvature of the concave mirror portion.