Integrated circuit structures
AssigneeIntel Corporation
InventorsBruce Block, Valluri R. Rao, Patrick Morrow, Rishabh Mehandru, Doug Ingerly, Kimin Jun, Kevin O'Brien, Paul Fischer, Szyua S. Liao
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AssigneeIntel Corporation
InventorsBruce Block, Valluri R. Rao, Patrick Morrow, Rishabh Mehandru, Doug Ingerly, Kimin Jun, Kevin O'Brien, Paul Fischer, Szyua S. Liao
Estimating the term…
Integrated circuit cell architectures including both front-side and back-side structures. One or more of back-side implant, semiconductor deposition, dielectric deposition, metallization, film patterning, and wafer-level layer transfer is integrated with front-side processing. Such double-side processing may entail revealing a back side of structures fabricated from the front-side of a substrate. Host-donor substrate assemblies may be built-up to support and protect front-side structures during back-side processing. Front-side devices, such as FETs, may be modified and/or interconnected during back-side processing. Back-side devices, such as FETs, may be integrated with front-side devices to expand device functionality, improve performance, or increase device density.
A device structure, comprising:
A device structure, comprising:
An integrated circuit (IC) structure, comprising:
Dependencies are inferred from the claim text.