Substrate transfer mechanism, substrate processing apparatus, and substrate transfer method

A substrate transfer mechanism comprising:

• a moving body moving horizontally;
• a support body supported by the moving body;
• a first rotary shaft and a second rotary shaft provided at the support body while being spaced apart from each other and extended vertically;
• a first arm extending forward from the first rotary shaft and including a tip portion forming a first substrate support region where one or more substrates are supported at an outer side of the support body;
• a second arm extending forward from the second rotary shaft and including a tip portion forming a second substrate support region where one or more substrates different from the substrates supported by the first arm are supported at the outer side of the support body, the first arm and the second arm being disposed at different height positions;
• a third rotary shaft vertically extended and configured to rotate the support body with respect to the moving body;
• and
• a switching mechanism configured to switch a first rotation operation of rotating the support body such that a distance in a right-left direction between the first substrate support region and the second substrate support region is maintained and a second rotation operation of rotating the support body together with a rotation of at least one of the first rotary shaft and the second rotary shaft such that the distance in the right-left direction between the first substrate support region and the second substrate support region is changed between a first distance and a second distance shorter than the first distance.