Silicon carbide single crystal substrate and method for manufacturing the same

A silicon carbide single crystal substrate, comprising:

• a first main surface;
• a second main surface opposite to the first main surface;
• and
• a circumferential edge portion connecting the first main surface and the second main surface,
• the circumferential edge portion having a linear orientation flat portion, a first arc portion having a first radius, and a second arc portion connecting the linear orientation flat portion and the first arc portion and having a second radius smaller than the first radius, when viewed along a direction perpendicular to the first main surface,
• wherein the second radius is more than or equal to 50 μm and less than or equal to 1000 μm,
• wherein a material constituting the silicon carbide single crystal substrate is hexagonal silicon carbide,
• the linear orientation flat portion is located in a [1-100] direction with respect to a center of gravity of the silicon carbide single crystal substrate, and
• wherein the linear orientation flat portion has a length which extends in a first direction perpendicular to the [1-100] direction from a top view, and has a height which extends in a second direction perpendicular to the [1-100] direction from the top view.