Textured skin for chamber components
AssigneeApplied Materials, Inc.
InventorsGangadhar Sheelavant, Cariappa Achappa Baduvamanda, Kaushik Vaidya, Bopanna Ichettira Vasantha
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AssigneeApplied Materials, Inc.
InventorsGangadhar Sheelavant, Cariappa Achappa Baduvamanda, Kaushik Vaidya, Bopanna Ichettira Vasantha
Estimating the term…
A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber has a base component body. The base component body has an exterior surface configured to face a processing environment of the processing chamber. A textured skin is conformable to the exterior surface. The textured skin has a first side configured to be disposed against the exterior surface and a second side facing away from the first side. The second side has a plurality of engineered features configured to enhance adhesion of material deposited on the textured skin during use of the processing chamber.
A chamber component for a processing chamber, the chamber component comprising:
An engineered film for a shield of a processing chamber, the engineered film comprising:
A processing chamber, comprising:
Dependencies are inferred from the claim text.