US 10,872,744 B2 · Charged particle beam apparatus

Abstract

In a charged particle beam apparatus is provided with an optical image capturing apparatus having an angle different from that of a column, a sample may collide with other components when the sample is faced toward the optical image capturing apparatus. The charged particle beam apparatus includes a stage configured to place a sample thereon and to move the sample inside a sample chamber; a column configured to observe the sample by irradiating a charged particle beam on the sample; a first image capturing apparatus configured to observe a surface of the sample irradiated with the charged particle beam from an angle different from that of the column; and a control unit configured to, when observing the sample via the first image capturing apparatus, separate the sample from the column and to tilt the sample through the stage to face toward the first image capturing apparatus.

Claims10

Dependent claims

A charged particle beam apparatus comprising:

a stage configured to place a sample thereon and to move the sample inside a sample chamber;
a column of a scanning electron microscope configured to irradiate a charged particle beam on the sample by outputting the charged particle beam in a direction perpendicular to an upper surface of the stage;
a first image capturing apparatus configured to observe a surface of the sample irradiated with the charged particle beam from an angle different from that of the column and obtain an optical image of the sample;
and
a control unit configured to, when observing the sample via the first image capturing apparatus, separate the sample from the column by moving the sample in a vertical direction away from the column and, subsequently, to tilt the sample through the stage to face toward the first image capturing apparatus;
wherein the control unit corrects a magnification and coordinates of the first image capturing apparatus according to a position of the sample when observing the sample by using the first image capturing apparatus.

3 more elements

A method of observing a sample comprising:

irradiating the sample in a first position with a charged particle beam from a column of a scanning electron microscope by outputting the charged particle beam in a direction perpendicular to an upper surface of a stage on which the sample is located;
obtaining an optical image of a surface of the sample irradiated with the charged particle beam by a first image capturing apparatus provided in a direction different from that of the column with respect to the sample;
separating the sample from the column by moving the sample in a vertical direction away from the column and, subsequently, tilting the sample to a second position different from the first position such that the sample faces toward the first image capturing apparatus;
observing the sample in the second position by the first image capturing apparatus;
and
correcting a magnification and coordinates of the first image capturing apparatus according to a position of the sample when observing the sample by using the first image capturing apparatus.

3 more elements

Dependencies are inferred from the claim text.

Charged particle beam apparatus

Life of this patent

Charged particle beam apparatus

Life of this patent

Abstract

Claims10