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US 10,872,407 B2Granted
Method and apparatus for detecting defects, and computer readable storage medium
AssigneesBoe Technology Group Co., Ltd., Chongqing Boe Optoelectronics Technology Co., Ltd.
InventorsZhengdong Xi, GyuHyun Lee, Chaoqiang Liu, Jianhong Wang, Jinshun Wang
Life of this patent
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Abstract
A method of detecting defects includes: obtaining a gray-scale image of a substrate to be detected; obtaining a gray-scale difference g between different regions in the gray-scale image; calculating an estimated value of a film thickness difference d between the different regions in the gray-scale image according to the gray-scale difference g; and determining whether the substrate to be detected is qualified according to the estimated value of the film thickness difference d.
Claims16
A method of detecting defects, comprising:
- obtaining a gray-scale image of a substrate to be detected;
- obtaining a gray-scale difference g between different regions in the gray-scale image;
- calculating an estimated value of a film thickness difference d between the different regions in the gray-scale image according to the gray-scale difference g;
- and
- determining whether the substrate to be detected is qualified according to the estimated value of the film thickness difference d,
- wherein obtaining the gray-scale difference g between different regions in the gray-scale image, comprises:
- determining whether there is a gray-scale abnormal region in the gray-scale image, wherein the gray-scale abnormal region is a region in which a gray-scale value is too large or too small in the gray-scale image;
- defining the gray-scale abnormal region and a gray-scale normal region in the gray-scale image in response to determining that there is the gray-scale abnormal region in the gray-scale image, and then proceeding to a next step;
- determining that the substrate to be detected is qualified in response to determining that there is no gray-scale abnormal region in the gray-scale image;
- and
- calculating the gray-scale difference g between the gray-scale abnormal region and the gray-scale normal region, and
- wherein calculating the estimated value of the film thickness difference d between the different regions in the gray-scale image according to the gray-scale difference g, comprises:
- calculating an estimated value of a film thickness difference d between the gray-scale abnormal region and the gray-scale normal region according to the gray-scale difference g.
10 more elements
An apparatus for detecting defects, comprising:
- a gray-scale image acquisition device configured to obtain a gray-scale image of a substrate to be detected;
- a processor connected to the gray-scale image acquisition device, the processor being configured to obtain a gray-scale difference g between different regions in the gray-scale image, calculate an estimated value of a film thickness difference d between the different regions in the gray-scale image according to the gray-scale difference g, and determine whether the substrate to be detected is qualified according to the estimated value of the film thickness difference d,
- wherein the processor is configured to:
- determine whether there is a gray-scale abnormal region in the gray-scale image, wherein the gray-scale abnormal region is a region in which a gray-scale value is too large or too small in the gray-scale image;
- define the gray-scale abnormal region and a gray-scale normal region in the gray-scale image in response to determining that there is the gray-scale abnormal region in the gray-scale image;
- determine that the substrate to be detected is qualified in response to determining that there is no gray-scale abnormal regions in the gray-scale image;
- calculate the gray-scale difference g between the gray-scale abnormal region and the gray-scale normal region;
- calculate an estimated value of a film thickness difference d between the gray-scale abnormal region and the gray-scale normal region according to the gray-scale difference g;
- and
- determine whether the substrate to be detected is qualified according to the estimated value of the film thickness difference d.
7 more elements
Dependencies are inferred from the claim text.