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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAstha Sharma, Chia-Hung Lai, Hsin-Kuo Chang, Jaw-Lih Shih, Hong-Hsing Chou
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In embodiments of the present disclosure, a vibrator is used to generate a vibration wave with a variable frequency that can agitate and facilitate the circulation of the processing fluids, thereby enhancing the uniformity and efficiency of the resulting semiconductor device features, the vibrator may be a piezoelectric vibrator or other similar vibrators. In some embodiments, the vibration of the processing fluids can facilitate the processing fluids in circulating in and out of narrow channels or features, or the vibration of the processing fluids can facilitate the bubbling out of the microbubbles entrapped in the processing liquid or entrapped between the surface of the semiconductor wafer and the processing liquid. In another embodiment, the vibrations generated by the vibrator have vibration waves with a variable frequency to avoid resonance that may damage the semiconductor wafer and the features thereon.
An apparatus comprising:
A method comprising:
An apparatus comprising:
Dependencies are inferred from the claim text.