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US 10,871,719 B2Granted
EUV metal droplet catchers
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Ta Lin, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien
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Abstract
A droplet catcher includes a tube main body and baffles arranged along a length direction of the tube main body.
Claims20
An extreme ultraviolet (EUV) lithography system, comprising:
- an EUV source to generate EUV radiation, wherein the EUV source includes a laser and a target material droplet generator;
- a mask stage configured to secure an EUV mask;
- a wafer stage configured to secure a semiconductor wafer;
- and
- an optical system designed to direct the EUV radiation from the EUV source to image a pattern defined on the EUV mask to the semiconductor wafer,
- wherein the EUV source further includes a metal droplet catcher that comprises a first end to receive metal droplets generated from the target material droplet generator and a second end opposite to the first end, and
- wherein the metal droplet catcher includes a baffle system including groove-form baffles formed on an inner wall of the baffle system along a length of the metal droplet catcher from the first end to the second end, and wherein a depth of the groove-form baffles gradually increases along the length of the metal droplet catcher.
4 more elements
A metal droplet catcher, comprising:
- a tube main body that comprises a first end for receiving metal droplets and a second end opposite to the first end;
- and
- baffles arranged on a portion of an inner surface of the tube main body along a length of the tube main body from the first end to the second end, wherein the baffles are groove-form baffles, and wherein a depth of the groove-form baffles gradually increases along the length of the tube main body.
A metal droplet catcher tube, comprising:
- a main body that comprises a first end for receiving metal droplets and a second end opposite to the first end;
- and
- baffles arranged on a portion of an inner surface of the main body along a length of the main body from the first end to the second end, wherein the baffles are groove-form baffles, and wherein a depth of the groove-form baffles gradually increases along the length of the main body.
Dependencies are inferred from the claim text.