Imprint apparatus and method of manufacturing article

A method of manufacturing an article, the method comprising:

• forming a pattern on a substrate using an imprint apparatus;
• and
• processing the substrate on which the pattern has been formed,
• wherein the imprint apparatus forms a pattern of an imprint material on the substrate by using a mold, and includes:
• a mold holding unit configured to hold the mold by adsorption;
• a substrate holding unit configured to hold the substrate by adsorption;
• an image capturing unit configured such that a field of view of the image capturing unit includes a pattern region of the mold held by the mold holding unit, wherein the image capturing unit is arranged so as to be capable of capturing an image of a surface on which the mold and the imprint material are in contact with each other during a mold pressing operation;
• a measurement unit configured to measure at least one of an adsorption pressure of the mold by the mold holding unit and an adsorption pressure of the substrate by the substrate holding unit;
• and
• a control unit configured to determine, based on an image captured by the image capturing unit and adsorption pressure measured by the measurement unit after a mold separating operation for separating the mold from a cured imprint material on the substrate, whether the mold is separated from the cured imprint material on the substrate in the mold separating operation,
• wherein in a case where the mold separating operation is not normally performed, the control unit classifies, based on the image captured by the image capturing unit and the adsorption pressure measured by the measurement unit after the mold separating operation is performed, a type of abnormality from among three or more types of abnormalities in the mold separating operation.