Micromirror device and method for operating a micromirror device

A method for operating a micromirror device, the micromirror device including a substrate, an outer frame element, which is connected to the substrate along a first oscillating axis, using a first suspension device, and is deflectable about the first oscillating axis, an inner frame element, which is connected to the outer frame element along the first oscillating axis, using a second suspension device, and an oscillating plate, which includes a micromirror and is connected to the inner frame element along a second oscillating axis, using a third suspension device, the first oscillating axis being perpendicular to the second oscillating axis, wherein the inner frame element includes displaceable deflection elements, and the oscillating plate is deflectable by displacing the deflection elements relative to the outer frame element, the method comprising:

• deflecting the outer frame element about the first oscillating axis;
• and
• deflecting the oscillating plate relative to the outer frame element by displacing the deflection elements,
• wherein the deflection elements each include a beam element running parallelly to the second oscillating axis in an undeflected state, and an inertial mass positioned on the beam element, and
• wherein the beam elements taper towards their outer end region.