Metal oxide based radiation sensor
AssigneeKing Saud University
InventorsAbdullah Nasser Alodhayb, Hamad Abdulaziz Albrithen, Khaled Zouher Shamma
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Abstract
A metal oxide based radiation sensor includes a titanium dioxide (TiO2) thin film layer on a microcantilever surface. The TiO2 thin film layer initially comprises anatase and rutile crystal structures. Exposure to radiation, such as gamma radiation, results in changes in structural features and mechanical behaviors of the metal oxide based radiation sensor. In particular, the resonant frequency changes with exposure to radiation dosages. The structural and mechanical behaviors of the metal oxide based radiation sensor change proportionally with dosage within a range of dosages.
Claims16
A radiation sensor comprising:
- a substrate;
- a microcantilever having one end operatively coupled to the substrate;
- and
- a metal oxide layer arranged on a surface of the microcantiever,
- wherein the metal oxide layer comprises the metal oxide in at least one crystal form, the at least one crystal form being capable of transformation to a different form upon exposure to a radiation to be detected.
A method of fabricating a radiation sensor comprising:
- providing a microcantilever having one end coupled to a substrate;
- and
- coating a side of the microcantilever with a metal oxide layer,
- wherein the metal oxide layer comprises the metal oxide in at least one crystal form, the at least one crystal form being capable of transformation to a different form upon exposure to a radiation to be detected.
Dependencies are inferred from the claim text.