Inspection system
AssigneeTokyo Electron Limited
InventorTetsuya Kagami
Life of this patent
Estimating the term…
Abstract
An inspection system includes a plurality of prober units each configured to bring probes of a probe card into contact with devices formed on a substrate on a stage, and a tester configured to apply electrical signals to the devices on the substrate through the probe card to inspect electrical characteristics of the devices. The plurality of prober units are arranged such that a plurality of units each of which has the prober units stacked in multiple stages are arranged in multiple rows in a horizontal direction, and at least one test unit constituting a main part of the tester is arranged to a side of a predetermined prober unit among the plurality of prober units.
Claims13
An inspection system comprising:
- a plurality of prober units, each configured to bring probes of a probe card into contact with devices formed on a substrate on a stage;
- and
- a tester configured to apply electrical signals to the devices on the substrate through the probe card to inspect electrical characteristics of the devices,
- wherein multiple units, each of which includes the prober units stacked in multiple stages, are arranged in multiple rows in a horizontal direction, and
- at least one test unit constituting a main part of the tester is disposed at a side of a predetermined prober unit among the prober units,
- wherein the test unit is disposed between adjacent prober units in the horizontal direction among the prober units.
An inspection system comprising:
- a plurality of prober units, each configured to bring probes of a probe card into contact with devices formed on a substrate on a stage;
- and
- a tester configured to apply electrical signals to the devices on the substrate through the probe card to inspect electrical characteristics of the devices,
- wherein multiple units, each of which includes the prober units stacked in multiple stages, are arranged in multiple rows in a horizontal direction, and
- at least one test unit constituting a main part of the tester is disposed at a side of a predetermined prober unit among the prober units,
- the tester includes one or more tester module boards, each of which is configured to apply electrical signals to the devices formed on the substrate to measure electrical characteristics of the devices, and one or more tester motherboards, each of which serves as an interface between the probe card and one of the tester module boards connected thereto,
- the test unit includes the tester module boards, and a controller and a power supply for the tester module boards,
- the tester motherboards are disposed at the prober units corresponding thereto,
- among components of each of the tester module boards, a component having a high operating frequency or a component having a high waveform accuracy is disposed closer to one of the tester motherboards connected thereto, and
- the components of each of the tester module boards are arranged closer to one of the tester motherboards connected thereto in the order of the component having a higher operating frequency to a lower operating frequency or a higher waveform accuracy to a lower waveform accuracy.
Dependencies are inferred from the claim text.