Semiconductor inspection system and semiconductor inspection apparatus

A semiconductor inspection system comprising:

• a first camera configured to capture an image of a first lead and a second lead of a semiconductor package from a first direction perpendicular to an upper surface and a lower surface at a same time, the semiconductor package including a sealing portion, the first lead, and the second lead, the sealing portion sealing a semiconductor chip, the sealing portion having the upper surface, the lower surface, a first side surface, and a second side surface opposite to the first side surface, the first lead extending sideward from the first side surface of the sealing portion, and the second lead extending sideward from the second side surface;
• a first calculator calculating a front length of the first lead and the second lead from the image captured by the first camera;
• a first light source provided on an upper surface side and a first side surface side of the semiconductor package;
• a second light source provided on the upper surface side and a second side surface side of the semiconductor package;
• a first mirror provided on a lower surface side and the second side surface side of the semiconductor package and configured to reflect a silhouette image of the first lead illuminated by the first light source;
• a second mirror provided on the lower surface side and the first side surface side of the semiconductor package and configured to reflect a silhouette image of the second lead illuminated by the second light source;
• a second camera provided on the lower surface side of the semiconductor package, the second camera configured to capture the silhouette image of the first lead from a second direction inclined with respect to the upper surface and the lower surface, the second camera configured to capture the silhouette image of the second lead from a third direction inclined with respect to the upper surface and the lower surface, the second camera configured to capture the silhouette image of the first lead and the silhouette image of the second lead at the same time;
• a second calculator configured to calculate an oblique length of the first lead and the second lead from the image captured by the second camera;
• and
• a third calculator configured to calculate an amount of floating of the first lead and the second lead from a reference plane parallel to the upper surface and the lower surface, using the front length and the oblique length,
• wherein a perpendicular line drawn from an end of the first light source close to the semiconductor package to the reference plane intersects the semiconductor package or the first lead, and
• a perpendicular line drawn from an end of the second light source close to the semiconductor package to the reference plane intersects the semiconductor package or the second lead.

A semiconductor inspection system comprising:

• a first camera capturing an image of a first lead of a semiconductor package from a first direction perpendicular to an upper surface and a lower surface, the semiconductor package including a sealing portion and the first lead, the sealing portion sealing a semiconductor chip, the sealing portion having the upper surface, the lower surface, a first side surface, and a second side surface opposite to the first side surface, the first lead extending sideward from the first side surface of the sealing portion;
• a first calculator configured to calculate a front length of the first lead from the image captured by the first camera
• a second camera configured to capture an image of the first lead from a second direction inclined with respect to the upper surface and the lower surface;
• a second calculator configured to calculate an oblique length of the first lead from the image captured by the second camera;
• and
• a third calculator configured to calculate an amount of floating of the first lead from a reference plane parallel to the upper surface and the lower surface, using the front length and the oblique length,
• wherein the third calculator configured to calculate the amount of floating using the following expression in a case in which an angle formed between the reference plane and the second direction is θ, the front length is LA, the oblique length is LB, and the amount of floating is H:
• H=LA×tan θ−LB/cos θ (Expression).