SERS sensor apparatus with passivation film
AssigneeHewlett-Packard Development Company, L.P.
InventorsZhizhang Chen, Chien-Hua Chen, James E Abbott
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Abstract
A method for forming a surface enhanced Raman spectroscopy (SERS) sensing apparatus may include providing a body having an internal microfluidic passage, the microfluidic passage having an interior surrounded by an interior surface, depositing a conformal inorganic passivation film onto the interior surface so as to continuously surround the interior by atomic layer deposition and positioning a SERS sensor in connection with the microfluidic passage after the depositing of the conformal inorganic film.
Claims20
A method for forming a surface enhanced Raman spectroscopy (SERS) sensing apparatus, the method comprising:
- providing a body having an internal microfluidic passage, the microfluidic passage having an interior surrounded by an interior surface;
- depositing a conformal inorganic passivation film onto the interior surface so as to continuously surround the interior;
- and
- positioning a SERS sensor in connection with the microfluidic passage after the depositing of the conformal inorganic film.
A surface enhanced Raman spectroscopy (SERS) sensing apparatus comprising:
- a body;
- a SERS sensor within the body;
- a microfluidic passage extending within the body to supply fluid to the sensor, the microfluidic passage having an interior surrounded by an interior surface;
- a conformal inorganic film on the interior surface of the microfluidic passage and continuously extending about the interior of the microfluidic passage.
A surface enhanced Raman spectroscopy (SERS) sensing apparatus comprising:
- a first body portion comprising:
- an inlet cavity;
- an outlet cavity;
- a groove extending between and interconnecting the inlet cavity and the outlet cavity;
- a second body portion secured to the first body portion so as to cover the groove;
- a conformal inorganic film continuously extending from the inlet cavity to the outlet cavity and continuously extending across a junction of the first body portion and the second body portion;
- and
- a SERS sensor on top of the conformal inorganic film.
Dependencies are inferred from the claim text.