Sensor assemblies with multirange construction

A sensor device comprising:

• a sensor die comprising first and second members and a buried cavity disposed between the first and second members:
• a first membrane disposed within the sensor die and extending between an outer surface of the first member and the buried cavity, wherein the first membrane is configured to deflect into the buried cavity in response to receiving an external force at a first force amount;
• a second membrane disposed within the sensor die second member and vertically aligned with the first membrane, wherein the buried cavity is interposed between the first and second membranes, and wherein the second membrane is configured to deflect in response to contact from the first membrane when the first membrane receives an external force at a second force amount;
• and
• electrical sensing elements disposed within the sensor die and positioned for measuring movement of the respective first and second membranes in response to an external force being imposed on the first membrane.

A method for sensing a force comprising:

• subjecting an external force onto a sensor device comprising a sensor die having disposed therein a first membrane and a second membrane that is in alignment with the first membrane, wherein sensor die comprises a buried cavity adjacent the first membrane, and wherein the external force is directed onto the first membrane and the first membrane is configured to deflect into the buried cavity in depending on the external force amount, and wherein the second membrane is configured to deflect when contacted by the first membrane depending on the external force amount;
• detecting an amount that one or both of the first membrane and second membrane deflects in response to the external force from electrical sensing elements disposed within the sensor die;
• and
• determining the amount of the external force from an output of the electrical sensing elements as transferred from the sensor device through electrical contacts disposed on a surface of the sensor die.