Valve and gas control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsNobuhira Tanaka, Daisuke Kondo
Life of this patent
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AssigneeMurata Manufacturing Co., Ltd.
InventorsNobuhira Tanaka, Daisuke Kondo
Estimating the term…
A valve includes a first plate, a side wall plate, a second plate, and a third plate. The first plate has a plurality of first vent holes. The second plate constitutes a valve chamber along with the first plate and the side wall plate. The second plate includes a second principal surface opposing a first principal surface of the first plate. The second plate has a plurality of second vent holes. The third plate has a plurality of third vent holes. The plurality of third vent holes overlaps with the plurality of first vent holes without overlapping with the plurality of second vent holes in a plan view in a direction in which the first plate and the second plate oppose each other. Both principal surfaces of the third plate oppose the first principal surface and the second principal surface. The third plate is disposed in the valve chamber.
A valve comprising:
A valve comprising:
A valve comprising:
Dependencies are inferred from the claim text.