Deposition apparatus, method of forming thin film using the same, and method of manufacturing organic light emitting display apparatus

A method of manufacturing an organic light emitting display apparatus using a deposition apparatus, the method comprising forming at least one thin film in the organic light emitting display apparatus, wherein the forming of the at least one thin film comprises:

• carrying a substrate into a chamber;
• ejecting one or more deposition materials toward the substrate using a deposition source in the chamber;
• and
• capturing the deposition materials remaining in the chamber using a cooling plate coupled to a refrigerator and corresponding to an inner surface of the chamber, at which an exhaust opening is formed,
• wherein the cooling plate and the exhaust opening are formed in a same surface of the chamber and wherein the cooling plate is disposed around the exhaust opening in the chamber.