Heating device for evaporation, evaporation device and evaporation method

A heating device for evaporation, comprising:

• a crucible for holding vapor an evaporation raw material;
• a movable heating unit which is disposed outside the crucible and being capable of moving in a direction perpendicular to a bottom surface of the crucible;
• a weight sensing unit which is disposed below the crucible and configured to weigh the crucible and the evaporation raw material in the crucible and output weight information;
• a controller configured to control a height from the movable heating unit to the bottom surface of the crucible;
• and
• a temperature sensing unit which is connected with the controller and configured to measure a temperature of the evaporation raw material by measuring an infrared spectrum emitted by the evaporation raw material,
• wherein the controller is respectively communicated with the weight sensing unit and the movable heating unit and configured to:
• receive the weight information outputted by the weight sensing unit,
• calculate a liquid height of the evaporation raw material in the crucible according to the weight information, a density of the evaporation raw material, and an area of the bottom surface of the crucible,
• control the height from the movable heating unit to the bottom surface of the crucible according to the liquid height, and
• control the height from the movable heating unit to the evaporation raw material according to the temperature of the evaporation raw material,
• wherein the movable heating unit is disposed at a position higher than the evaporation raw material in an evaporation process,
• wherein, when the movable heating unit is controlled by the controller to move in the direction perpendicular to the bottom surface of the crucible, a distance between the movable heating unit and the evaporation raw material is adjusted, so that the evaporation rate of the evaporation raw material is adjusted.