Imprint apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorTomohiro Harayama
Life of this patent
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Abstract
An imprint apparatus includes a mold holder that holds a mold, a substrate holder that holds a substrate by suction, a driving device that brings the mold into contact with an imprint material on the substrate by relatively bringing the mold holder and the substrate holder close to each other, and a controller. The controller controls the driving device so as to bring the mold into contact with the imprint material in a state in which the substrate is deformed into a convex shape with respect to the mold by controlling pressures inside the plurality of suction regions based on surface shape data of the substrate held by the substrate holder.
Claims16
An imprint apparatus that performs an imprint process of forming a pattern by bringing a mold into contact with an imprint material on a substrate, the imprint apparatus comprising:
- a mold holder that holds the mold;
- a substrate holder that holds the substrate by suction;
- a driving mechanism that brings the mold into contact with the imprint material by relatively bringing the mold holder and the substrate holder close to each other;
- and
- a controller, including a memory and a processor, that:
- controls an internal pressure of an enclosed space formed by the substrate holder holding the substrate;
- controls the driving mechanism during the imprint process;
- adjusts the internal pressure of the enclosed space based on surface shape data indicating a predetermined relationship between an internal pressure of the enclosed space and a surface shape of the substrate held by the substrate holder, to deform the substrate in an out-of-plane direction so that a shot region has a target shape that is convexing toward the mold;
- and
- controls the driving mechanism to start the contact in a state where the substrate is adjusted to have the target shape.
An imprint apparatus that performs an imprint process of forming a pattern by bringing a mold into contact with an imprint material on a substrate, the apparatus comprising:
- a mold holder that holds the mold;
- a substrate holder, including a plurality of suction regions, that holds the substrate by suction;
- a driving mechanism that brings the mold into contact with the imprint material by relatively bringing the mold holder and the substrate holder close to each other;
- and
- a controller, including a memory and a processor, that:
- controls an internal pressure of an enclosed space formed by the substrate holder holding the substrate;
- controls the driving mechanism during the imprint process;
- adjusts the internal pressure of the enclosed space to deform the substrate in an out-of-plane direction so that a shot region, among the plurality of shot regions, to be subjected to the imprint process has a target shape that is convexing toward the mold;
- controls the driving mechanism to start the contact in a state where the substrate is adjusted to have the target shape;
- and
- controls, in a case where the shot region, is a peripheral shot region located on an outer periphery of the substrate, controls a degree of convex shape of the substrate when the mold and an imprint material supplied to the peripheral shot region are brought into contact with each other by changing the internal pressure of the enclosed space in accordance with a position of the peripheral shot region on the substrate.
Dependencies are inferred from the claim text.