Beam homogenizer for surface modification

Abstract

A beam homogenizer for surface modification comprises: a first lens array configured to split a laser beam, irradiated from a laser beam irradiation unit, into a plurality of beamlets; a second lens array configured to transmit the plurality of beamlets and comprising a plurality of lenslets corresponding to the first lens array; and a focusing lens configured to focus the plurality of beamlets, transmitted through the second lens array, onto a surface of a target. The beam homogenizer further comprises: a plasma generation-preventing unit disposed between the first and second lens arrays and configured to prevent plasma from being generated in the focal zone of the beamlets; or a damage-preventing unit disposed between the focusing lens and the target and configured to prevent the focusing lens from being damaged by energy generated when the plurality of beamlets is irradiated onto the target.

Dependencies are inferred from the claim text.