Plating apparatus and plating method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTuan-Yu Hung, Hung-Jui Kuo, Ming-Che Ho
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTuan-Yu Hung, Hung-Jui Kuo, Ming-Che Ho
Estimating the term…
A plating apparatus includes a plating bath, a substrate holder, an anode electrode, and a fluid stirring member. The plating bath is configured to contain a plating solution. The substrate holder is configured to hold a substrate to be plated in the plating bath. The anode electrode is disposed in the plating bath. The fluid stirring member is disposed between the anode electrode and the substrate to be plated, and includes a plurality of first stirring stripes a plurality of second stirring stripes. The first stirring stripes extend along a first direction parallel to a plating surface of the substrate to be plated. The second stirring stripes extend along a second direction intersected with the plurality of first stirring stripes and parallel to the plating surface, wherein the fluid stirring member is configured to reciprocate along the first direction and the second direction.
A plating apparatus, comprising:
A plating method, comprising:
Dependencies are inferred from the claim text.