Mechanism for creating vacuum in processing apparatus

An intersecting module, comprising:

• a plurality of support members being ring structures and arranged along a longitudinal direction which is parallel to a connecting line of center points of the ring structures;
• and
• a plurality of internal ventilating plates each having a plurality of orifices, wherein at least one of the internal ventilating plates is positioned between two of the support members positioned adjacent to each other;
• wherein the internal ventilating plates are arranged in such a manner that projections of two of the internal ventilating plates in the longitudinal direction overlap, wherein one of the internal ventilating plates is inclined relative to a transversal direction that is perpendicular to the longitudinal direction by a first angle, another of the internal ventilating plates is inclined relative to the transversal direction by a second angle, and the first angle is different from the second angle.

An intersecting module, comprising:

• a first support member, a second support member and a third support member being ring structures and arranged along a longitudinal direction which is parallel to a connecting line of center points of the ring structures;
• and
• a plurality of internal ventilating plates each having a plurality of orifices, wherein a first group of internal ventilating plates are positioned between the first support member and the second support member, and a second group of internal ventilating plates are positioned between the second support member and the third support member;
• wherein the first group of internal ventilating plates and the second group of internal ventilating plates are arranged in a staggered manner.