US 10,865,473 B2 · Mask plate and process for manufacturing the same

Abstract

The present disclosure provides a mask plate and a method for manufacturing the same. The mask plate comprises a body provided with a plurality of openings, in which a first surface of the body is provided with cofferdams each surrounding a corresponding opening, and each cofferdam is configured to confine a diffusion range of a material deposited on a substrate through the opening. In the present disclosure, by providing, on a surface of the body of the mask plate, cofferdams each surrounding edges of each corresponding opening, the cofferdams can effectively prevent the deposition material from depositing into an invalid region, thus CVD shadow can be reduced and the packaging effect can be improved in the process of film deposition or evaporation by chemical vapor deposition (CVD).

Claims18

Dependent claims

A mask plate, comprising a body provided with a plurality of openings, wherein a first surface of the body is provided with cofferdams each surrounding a corresponding opening of the plurality of openings, and each of the

cofferdams is configured to confine a diffusion range of a material deposited on a substrate through the corresponding openings;
the cofferdams are made of polyimide or polystyrene;
a height of each of the cofferdams is greater than 0 mm and less than or equal to 0.1 mm, and a thickness of a sidewall of each of the cofferdams is greater than 1 mm and less than or equal to 3 mm;
each of the plurality of openings is surrounded by one of the cofferdams;
and
a gap between a bottom surface of each of the cofferdams and a top surface of the substrate;
and
an enclosed gap between any two adjacent cofferdams between the bottom surface of the body and the top surface of the substrate.

5 more elements

Dependencies are inferred from the claim text.

Mask plate and process for manufacturing the same

Life of this patent

Mask plate and process for manufacturing the same

Life of this patent

Abstract

Claims18