Optical detection for bio-entities
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAllen Timothy Chang, Yi-Hsien Chang, Chun-Ren Cheng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAllen Timothy Chang, Yi-Hsien Chang, Chun-Ren Cheng
Estimating the term…
An integrated semiconductor device for manipulating and processing bio-entity samples and methods are described. The device includes a lower substrate, at least one optical signal conduit disposed on the lower substrate, at least one cap bonding pad disposed on the lower substrate, a cap configured to form a capped area, and disposed on the at least one cap bonding pad, a fluidic channel, wherein a first side of the fluidic channel is formed on the lower substrate and a second side of the fluidic channel is formed on the cap, a photosensor array coupled to sensor control circuitry, and logic circuitry coupled to the fluidic control circuitry, and the sensor control circuitry.
An integrated circuit device comprising:
An integrated semiconductor device comprising:
A method comprising:
Dependencies are inferred from the claim text.