Synthetic quartz glass lid precursor, synthetic quartz glass lid, and preparation methods thereof
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHarunobu Matsui, Daijitsu Harada, Masaki Takeuchi
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Abstract
A synthetic quartz glass lid for use in optical device packages is prepared by furnishing a synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate (1) and a metal or metal compound film (2), and forming a metal base adhesive layer (3) on the metal or metal compound film (2). The metal or metal compound film contains Ag, Bi, and at least one element selected from P, Sb, Sn and In.
Claims11
A synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate and a metal or metal compound film on one major surface thereof, the metal or metal compound film containing silver, bismuth, and at least one element selected from the group consisting of phosphorus, antimony, tin and indium, wherein
- the metal or metal compound film has a surface roughness (Ra) of up to 2 nm.
Dependencies are inferred from the claim text.