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US 10,865,112 B2Granted
Modified track-etched substrates for composite graphene membranes
AssigneeLockheed Martin Corporation
InventorsScott E. Heise, Han Liu, Jacob L. Swett, Michael J. Hiltabidle
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Abstract
Modified substrates are provided having nano- or microscale wells, tracks, channels, pores or perforations. Also provided are methods of making the same.
Claims27
A modified substrate comprising:
- a first face and an opposite facing second face 3 to 30 μm from each other defining a thickness;
- a first plurality of track-etched pores through the substrate;
- and
- a well in the first face of the substrate, wherein the well is from 100 to 1,000 μm in diameter, and wherein the well comprises a bottom surface that is 1 to 10 μm from the second face of the substrate, and wherein the pores have an average diameter between 10-2,000 nm.
1 more element
A modified substrate comprising:
- a first face and an opposite facing second face 6 to 30 μm from each other defining a thickness;
- a first plurality of pores through the substrate, comprising about 1×105 to 1×1011 pores per cm2 of substrate and pores having an average diameter between 10-10,000 nm;
- and
- a second plurality of pores through the substrate, comprising pores having an average diameter of 1% to 50% the average diameter of the pores of the first plurality of pores, wherein the second plurality of pores is comprised of 1×107 to 1×1013 pores per cm2 of substrate,
- wherein the second face comprises a coating of a two dimensional material or multiple layers thereof, wherein the two dimensional material is selected from graphene, graphene platelets, black phosphorous, hafnium dioxide, molybdenum disulfide, molybdenum diselenide, carbide, a carbon nanomembrane (CNM), a carbon nanotube (CNT), amorphous carbon and hydrocarbons, graphyne, borophene, germanene, silicone, Si2BN, stanine, phosphorene, bismuthene, molybdenite, palladium, rhodium, Pb/Sn alloy, Pb/Bi alloy, aerographite, aerogel, nanogel, carbon nanofoam, hexagonal boron nitride, borocarbonitride, germanane, transition metal dichalcogenide, or any combination thereof.
2 more elements
Dependencies are inferred from the claim text.