MEMS device and method for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChen Hsiung Yang, Chun-Wen Cheng, Chia-Hua Chu, En-Chan Chen
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Abstract
A MEMS device includes a first layer and a second layer including a same material, a third layer disposed between the first layer and the second layer, a first air gap separating the first layer and the third layer, a second air gap separating the second layer and the third layer, a plurality of first pillars exposed to the first air gap and arranged in contact with the first layer and the third layer, a plurality of second pillars exposed to the second air gap and arranged in contact with the second layer and the third layer.
Claims20
A microelectromechanical system (MEMS) device comprising:
- a first layer and a second layer comprising a same material;
- a third layer disposed between the first layer and the second layer, wherein the third layer comprises a first insulating layer, a second insulating layer and a semiconductor layer between the first insulating layer and the second insulating layer;
- a first air gap separating the first layer and the third layer;
- a second air gap separating the second layer and the third layer;
- a plurality of first pillars exposed to the first air gap and arranged in contact with the first layer, wherein the first pillars penetrate the first insulating layer to be in contact with the semiconductor layer of the third layer;
- and
- a plurality of second pillars exposed to the second air gap and arranged in contact with the second layer, wherein the second pillars penetrate the second insulating layer to be in contact with the semiconductor layer of the third layer.
A microelectromechanical system (MEMS) device comprising:
- a substrate having an environment port in communication with an ambient environment;
- a first layer over the substrate and comprising a first movable portion and at least a first hole formed in the first movable portion;
- a second layer over the first layer and comprising a second movable portion and a plurality of second holes formed in the second movable portion;
- a third layer disposed between the first layer and the second layer and comprising a plurality of third holes;
- a plurality of first pillars extending from the first movable portion of the first layer to the third layer;
- and
- a plurality of second pillars extending from the second movable portion of the second layer to the third layer,
- wherein the first pillars and the second pillars comprise a same material, and the first pillars are misaligned with the second pillars.
A microelectromechanical system (MEMS) device comprising:
- a first layer and a second layer comprising a same material;
- a third layer disposed between the first layer and the second layer;
- a first air gap separating the first layer and the third layer;
- a second air gap separating the second layer and the third layer;
- a plurality of first pillars exposed to the first air gap and arranged in contact with the first layer and the third layer;
- a plurality of second pillars exposed to the second air gap and arranged in contact with the second layer and the third layer;
- a plurality of first connecting structures coupled to the first layer and the third layer;
- and
- a plurality of second connecting structures coupled to the second layer and the third layer,
- wherein the first pillars and the first connecting structures comprise a same material, the second pillars and the second connecting structures comprise a same material and the first pillars are misaligned with the second pillars.
Dependencies are inferred from the claim text.