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US 10,864,663 B2Granted
Imprint apparatus and method of detecting peeling defect in the same
AssigneeSamsung Display Co., Ltd.
InventorFutoshi Yoshida
Life of this patent
Estimating the term…
Abstract
An imprint apparatus includes: a pressure roller configured to press a film onto a substrate; an idle roller spaced from the pressure roller, the idle roller and pressure roller being configured to peel the film from the substrate; a pressure sensor connected to the pressure roller and configured to sense a first pressure applied to the pressure roller; and a controller configured to detect a peeling defect based on the first pressure.
Claims14
An imprint apparatus comprising:
- a pressure roller configured to press a film onto a substrate;
- an idle roller spaced from the pressure roller, the idle roller and the pressure roller being configured to peel the film from the substrate;
- a pressure sensor connected to the pressure roller and configured to sense a pressure applied to the pressure roller;
- and
- a controller configured to detect a peeling defect based on the pressure.
2 more elements
An imprint apparatus comprising:
- a pressing portion comprising a pressure roller configured to press a film onto a substrate and a pressure sensor configured to sense a first pressure of the pressure roller;
- an idle portion configured to move to adjust a peeling angle at which the film is peeled from the substrate;
- a tensioner configured to control a tension of the film;
- and
- a controller configured to detect a peeling defect based on the pressure.
2 more elements
Dependencies are inferred from the claim text.