Compliance unit

A compliance unit having a support plate attached to a conveying device, and an attaching plate to which a gripping member is attached, the attaching plate being movably mounted on the support plate in a planar direction extending along the support plate, in an axial direction extending along a central axis of the support plate, and in an inclined direction inclined to the central axis, the compliance unit comprising:

• a piston reciprocatably mounted in a pressure chamber in the axial direction, the pressure chamber being provided in the support plate;
• a fixing disk having a cylindrical portion fixed to the support plate, and an annular portion provided at a tip of the cylindrical portion so as to protrude radially outside the cylindrical portion, an annular, arc surface being formed in a front surface of the annular portion;
• a movable plate having an annular base portion arranged between the annular portion and the support plate, and a linking portion protruding radially outward from the base portion and fastened to the attaching plate;
• an abutment surface provided to the attaching plate opposite the arc surface, and guiding movement of the attaching plate in the inclined direction under a state of contacting with the arc surface;
• a spring member mounted between the piston and the attaching plate, and energizing a spring force to the attaching plate in a direction separate from the fixing disk;
• and
• a reference position returning mechanism located inside the cylindrical portion, and disposed between the piston and the attaching plate, the reference position returning mechanism locking the attaching plate at a reference position,
• wherein the movement of the attaching plate in the inclined direction is guided by the annular, arc surface, and the attaching plate is locked by the reference position returning mechanism located radially inside the arc surface.