Evaluation jig and evaluation method for height position detection unit of laser processing apparatus
AssigneeDisco Corporation
InventorKenji Furuta
Life of this patent
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Abstract
Disclosed herein is an evaluation jig that is a jig to be used for evaluation of a height position detection unit that detects the height position of a holding surface of a chuck table of a laser processing apparatus. The evaluation jig includes a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a Z-axis direction, a base section that supports the actuator and is mounted on the holding surface of the chuck table, and a control unit that controls movement of the actuator.
Claims6
An evaluation jig for a height position detection unit of a laser processing apparatus, the laser processing apparatus including:
- a chuck table that holds a workpiece by a holding surface,
- a laser beam applying unit having a laser oscillator that applies a processing laser beam having such a wavelength as to be transmitted through the workpiece to the workpiece held by the chuck table, and a focusing unit that focuses the processing laser beam,
- a focal point position adjusting unit that displaces a focal point position of the processing laser beam,
- the height position detection unit that applies a detection laser beam to the workpiece held by the chuck table through the focusing unit to detect a height position of an upper surface of the workpiece, and
- a control unit that controls the focal point position adjusting unit based on a detection signal from the height position detection unit,
- the evaluation jig comprising:
- a to-be-irradiated surface which is to be irradiated with the detection laser beam;
- an actuator that moves the to-be-irradiated surface in a direction orthogonal to the to-be-irradiated surface;
- a base section which supports the actuator and is mounted on the holding surface;
- and
- a control section that controls movement of the actuator,
- wherein the evaluation jig is seated upon the holding surface of the chuck table.
An evaluation method for a height position detection unit of a laser processing apparatus, the evaluation method comprising:
- mounting an evaluation jig on a holding surface of a chuck table of the laser processing apparatus, the evaluation jig including a to-be-irradiated surface which is to be irradiated with a detection laser beam, an actuator that moves the to-be-irradiated surface in a direction orthogonal to the to-be-irradiated surface, a base section which supports the actuator and is mounted on the holding surface of the chuck table, and a control section that controls movement of the actuator;
- setting a movement program for controlling the actuator of the evaluation jig to move the to-be-irradiated surface at a desired amplitude;
- irradiating the to-be-irradiated surface of the evaluation jig mounted on the holding surface with the detection laser beam of the laser processing apparatus and detecting variation in a height position of the to-be-irradiated surface moved at the desired amplitude according to the movement program by the height position detection unit of the laser processing apparatus;
- comparing the variation in the height position detected by the height position detection unit with the amplitude set as the desired amplitude;
- and
- determining whether or not the height position detection unit has successfully detected the height position of the to-be-irradiated surface.
Dependencies are inferred from the claim text.