Tank for substrate cleaning, tank heating apparatus, tank heating method, and substrate cleaning apparatus

A tank heating apparatus, comprising:

• a tank for substrate cleaning, applied to a production line, wherein the tank for substrate cleaning comprises:
• a tank body, a hot waste gas recycle tube, a heater, a heat exchange tube and an exhaust tube, wherein the hot waste gas recycle tube is configured to receive a hot waste gas in a hot waste gas discharge tube of the production line, the heater and the heat exchange tube are configured to heat a fluid in the tank body, one end of the heat exchange tube is communicated with the hot waste gas recycle tube, and the other end of the heat exchange tube is communicated with the exhaust tube;
• a temperature sensor, which is arranged in the tank body and configured to detect a temperature of the fluid in the tank body;
• and
• a control device, which is electrically connected with the temperature sensor and configured to control the heater and/or the heat exchange tube to heat in case that the temperature of the fluid in the tank body is lower than a set temperature, and control the heater and the heat exchange tube to stop heating in the case that the temperature of the fluid in the tank body is not lower than the set temperature;
• wherein the tank body comprises an inner shell and an outer shell, a thermal insulation cavity is formed between the inner shell and the outer shell, and the thermal insulation cavity is communicated with the hot waste gas recycle tube;
• wherein a top of the outer shell is provided with a liquid inlet tube communicated with the thermal insulation cavity, and a bottom of the outer shell is provided with a liquid discharge tube communicated with the thermal insulation cavity;
• wherein the outer shell is provided with a gas inlet interface which is communicated with the hot waste gas recycle tube and used to introduce the hot waste gas to the thermal insulation cavity;
• the outer shell is further provided with an exhaust interface which is communicated with the exhaust tube through a connecting tube and used to discharge the hot waste gas in the thermal insulation cavity;
• wherein the hot waste gas recycle tube is a heat-insulated pipeline;
• the hot waste gas recycle tube is provided with a control valve which is configured to control whether to convey hot waste gas into the heat exchange tube;
• and
• wherein the liquid inlet tube and the liquid discharge tube are respectively provided with valves.

A tank heating method for heating a tank for substrate cleaning, wherein the tank for substrate cleaning is used in a production line, and comprises:

• a tank body, a hot waste gas recycle tube, a heater, a heat exchange tube, and an exhaust tube;
• the hot waste gas recycle tube is configured to receive a hot waste gas in a hot waste gas discharge tube of the production line, the heater and the heat exchange tube are configured to heat a fluid in the tank body, one end of the heat exchange tube is communicated with the hot waste gas recycle tube, and the other end of the heat exchange tube is communicated with the exhaust tube;
• wherein the tank body comprises an inner shell and an outer shell, a thermal insulation cavity is formed between the inner shell and the outer shell, and the thermal insulation cavity is communicated with the hot waste gas recycle tube;
• wherein a top of the outer shell is provided with a liquid inlet tube communicated with the thermal insulation cavity, and a bottom of the outer shell is provided with a liquid discharge tube communicated with the thermal insulation cavity;
• wherein the outer shell is provided with a gas inlet interface which is communicated with the hot waste gas recycle tube and used to introduce the hot waste gas to the thermal insulation cavity;
• the outer shell is further provided with an exhaust interface which is communicated with the exhaust tube through a connecting tube and used to discharge the hot waste gas in the thermal insulation cavity;
• wherein the hot waste gas recycle tube is a heat-insulated pipeline;
• the hot waste gas recycle tube is provided with a control valve which is configured to control whether to convey hot waste gas into the heat exchange tube;
• wherein the liquid inlet tube and the liquid discharge tube are respectively provided with valves;
• and
• wherein the tank heating method comprises steps of:
• detecting a temperature of the fluid in the tank body;
• and
• determining whether the temperature of the fluid in the tank body is lower than a set temperature, controlling the heater and/or the heat exchange tube to heat in case that the temperature of the fluid is lower than the set temperature, and controlling the heater and the heat exchange tube to stop heating in the case that the temperature of the fluid is not lower than the set temperature.