US 10,864,553 B2Granted

Piezoelectric transducers and methods of making and using the same

AssigneeThe Regents of the University of California

InventorsFiras Sammoura, Sina Akhbari, Liwei Lin

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Abstract

Piezoelectric transducers are provided. The piezoelectric transducer includes a first piezoelectric layer, a second piezoelectric layer disposed on at least a portion of the first piezoelectric layer, and a middle electrode layer disposed between the first and second piezoelectric layers, where the middle electrode layer includes an inner region and an outer region spaced apart from the inner region. Methods of making the piezoelectric transducers are also provided. The piezoelectric transducers and methods find use in a variety of applications, including devices, such as electronics devices having one or more (e.g., an array) of the piezoelectric transducers.

Claims18

Dependent claims

A piezoelectric transducer comprising:

a first piezoelectric layer;
a second piezoelectric layer disposed on at least a portion of the first piezoelectric layer;
a middle electrode layer disposed between the first and second piezoelectric layers, wherein the middle electrode layer comprises an inner region and an outer region spaced apart from the inner region, wherein the outer region of the middle electrode layer surrounds the inner region of the middle electrode layer;
a first via configured to expose a portion of the inner region of the middle electrode layer;
a second via configured to expose a portion of the outer region of the middle electrode layer;
a bottom electrode layer disposed on a surface of the first piezoelectric layer opposite the middle electrode layer;
a support layer disposed on a surface of the bottom electrode layer opposite the first piezoelectric layer;
and
a substrate on which at least a portion of the piezoelectric transducer is disposed.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/540,008Filed 14 Jan 2016 · us provisional application
Priority: 16 Jan 2015
Published: US 2017/0368574 A128 Dec 2017
Granted: 15 Dec 2020
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

B06B 1/0603
Operating with piezoelectric effect or with electrostriction: using a piezoelectric bender, e.g. bimorph
B06B 1/0622
Using multiple elements: on one surface
H10N 30/05
Manufacture or treatment: manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric…
H10N 30/081
Shaping or machining of piezoelectric or electrostrictive bodies: by coating or depositing using masks, e.g. lift-off

Family

Application62/104,556Us provisional application · filed 16 Jan 2015
US 2017/0368574 A1Pre-grant publication · published 28 Dec 2017
US 10,864,553 B2This patent

From the US filing history. Foreign family members aren’t listed.

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