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US 10,854,545 B1Granted
Anti-fuse structure
AssigneeNanya Technology Corporation
InventorsChin-Ling Huang, Chiang-Lin Shih
Life of this patent
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Abstract
An anti-fuse structure includes a substrate, an active layer, an electrode layer, and a dielectric layer. The active layer is on the substrate and has a body portion and a convex portion protruding from the body portion. The electrode layer is on the active layer and partially overlaps the convex portion of the active layer. The electrode layer has a hollow region, and the convex portion of the active layer is in the hollow region. The dielectric layer is between the active layer and the electrode layer.
Claims16
An anti-fuse structure, comprising:
- a substrate;
- an active layer on the substrate, wherein the active layer has a body portion and a convex portion protruding from the body portion;
- an electrode layer on the active layer and partially overlapping the convex portion of the active layer, wherein the electrode layer has a hollow region, and the convex portion of the active layer is in the hollow region;
- and
- a dielectric layer between the active layer and the electrode layer.
2 more elements
Dependencies are inferred from the claim text.