Substrate clamping device
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorWei Tan
Life of this patent
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Abstract
The present invention relates to a display manufacturing field. Disclosed is a substrate clamping device. The substrate is arranged on the trolley. The clamping arms arranged on the trolley are used for fixing the substrate. The clamping arms move up and down as rotating by means of the rotary lifting mechanism, thereby clamping and releasing the substrate. The impact on the substrate is small in the entire clamping process, and the handling of the substrate is facilitated. The clamping arms arranged around the substrate and symmetrically arranged in pair can keep the force of the substrate uniformly and can clamp the substrate more reliably.
Claims10
A substrate clamping device for fixing a substrate on a trolley of a sputtering machine, wherein
- the substrate clamping device comprises clamping arms, a tray and a lifting driving device connected to a bottom of the tray, the lifting driving device drives the tray to move up and down relative to the trolley;
- the clamping arms are provided on the trolley and are enclosed to form an accommodating space, the accommodating space is used to accommodate the substrate, the clamping arm comprises a bracket and a clamping jaw, the bracket is connected to the trolley by a rotary lifting mechanism to drive the clamping jaw to perform rotation and lifting movements simultaneously;
- the clamping jaws are in contact with an upper surface of the substrate after rotation and declining movements to clamp to be placed on the substrate;
- the tray is located below the trolley, the tray is provided with first pushing rods and second pushing rods;
- the first pushing rods cooperate with the clamping arms to push the clamping arms upward;
- the second pushing rods push the substrate upward.
Dependencies are inferred from the claim text.