Method for manufacturing air pulse generating element

A method for manufacturing an air pulse generating element, comprising:

• providing a thin film layer, wherein the thin film layer comprises a membrane;
• forming a plurality of actuators on the thin film layer;
• forming a first chamber between the thin film layer and a first plate, wherein forming the first chamber comprises bonding the first plate on a first surface of the thin film layer through a first bonding agent;
• patterning the thin film layer to form a plurality of valves, wherein the membrane and the valves are formed of the thin film layer;
• forming a second chamber between the thin film layer and a second plate, wherein forming the second chamber comprises bonding the second plate on a second surface of the thin film layer opposite to the first surface through a second bonding agent;
• and
• forming a plurality of channels in the first plate and the second plate.