Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof

An electronic apparatus, comprising:

• a timing circuit configured to generate a clock signal, the timing circuit including a microelectromechanical device including:
• a mobile structure including:
• mobile arms having a composite structure including an insulating material and a coating material that completely surrounds the core region;
• connecting elements coupled to the mobile arms;
• and
• a window;
• a suspension arm in the window and coupled to each of the connecting elements, the suspension arm having a first side and a second side opposite the first side;
• a first pair of anchors coupled to the first side of the suspension arm;
• a second pair of anchors coupled to the second side of the suspension arm;
• and
• a fixed structure including an actuating electrode and a detection electrode electrically coupled to one of the mobile arms, one of the actuating electrode and the detection electrode being in the window of the mobile structure and the other one of the actuating electrode and the detection electrode being outside the window of the mobile structure;
• and
• an application circuit coupled to the timing circuit to receive the clock signal.

A microelectromechanical device, comprising:

• a substrate;
• a mobile structure coupled to the substrate including:
• a pair of flexible arms;
• and
• a pair of connecting elements coupled to the pair of flexible arms around a window;
• a suspension arm coupled to each connecting element of the pair of connecting elements, at least one of flexible arm of the pair of flexible arms and the suspension arm have a composite structure including a core region including a first material and a coating layer on the core region including a second material different than the first material;
• a plurality of anchors in the window;
• a connection element in the window and coupled to two anchors of the plurality of anchors and the suspension arm;
• a first detection electrode coupled to the substrate and positioned inside the window;
• and
• a first actuating electrode coupled to the substrate and positioned outside the window, wherein a first one of the flexible arms is capacitively coupled to the first actuating electrode and the first detection electrode.