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US 10,770,645 B2Granted
Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head
AssigneeCanon Kabushiki Kaisha
InventorsYoshihiro Ohashi, Yoshinori Kotani, Motokazu Kobayashi
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Abstract
An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.
Claims4
An oriented piezoelectric film comprising a perovskite type crystal represented by general formula (1):
- Ba1-xCaxTi1-yZryO3(0≤x≤0.2, and 0≤y≤0.2) (1),
- wherein the oriented piezoelectric film is formed on a metallic electrode having a (111) orientation, and has the (111) orientation according to a pseudocubic crystal notation.
Dependencies are inferred from the claim text.