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US 10,770,642 B2Granted
Two-dimensional mode resonators
AssigneeCarnegie Mellon University
InventorsGianluca Piazza, Cristian Cassella
Life of this patent
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Abstract
A piezoelectric two-dimensional mode resonator suited for high frequency filtering applications, with the ability to simultaneously excite lateral and vertical acoustic waves.
Claims15
A MEM device forming a two-dimensional mode resonator comprising:
- a piezoelectric layer having a top surface and a bottom surface;
- a first metallic grating disposed on said top surface, said first metallic grating comprising a plurality of electrically-coupled, parallel electrodes extending across said top surface;
- and
- a second metallic grating disposed on said bottom surface, said second metallic grating comprising a plurality of electrically-coupled, parallel electrodes extending across said bottom surface;
- wherein all parallel electrodes on the top surface are connected together and further wherein all electrodes on the bottom surface are connected together.
2 more elements
Dependencies are inferred from the claim text.