Capacitive RF MEMS intended for high-power applications
AssigneeThales
InventorsAfshin Ziaei, Matthieu Le Baillif, Paolo Martins, Shailendra Bansropun
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Abstract
According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.
Claims10
A capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS for high-power applications comprising a membrane suspended above an RF transmission line and resting on ground planes, the membrane exhibiting a lower face and an upper face opposite to the lower face, wherein said membrane comprises a metallic material and in that a first layer comprising a refractory metallic material different from the metallic material of the membrane, said first layer at least partially covers the upper face of the membrane so as to prevent the heating of the membrane.
Dependencies are inferred from the claim text.