Chip package structure and method for forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLing-Wei Li, Jung-Hua Chang, Cheng-Lin Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLing-Wei Li, Jung-Hua Chang, Cheng-Lin Huang
Estimating the term…
A method for forming a chip package structure is provided. The method includes forming a conductive via structure in a first substrate. The method includes bonding a chip to a first surface of the first substrate. The method includes forming a barrier layer over a second surface of the first substrate. The method includes forming a first insulating layer over the barrier layer. The method includes forming a conductive pad over the first insulating layer and in the first opening, the second opening, and the third opening. The conductive pad continuously extends from the conductive via structure into the third opening. The method includes forming a conductive bump over the conductive pad in the third opening.
A method for forming a chip package structure, comprising:
A method for forming a chip package structure, comprising:
A chip package structure, comprising:
Dependencies are inferred from the claim text.